OM 21 benchtop micro-ohmmeter is used for 4-wire measurement of very low resistancevalues up to 20 kΩ with an accuracy of 0.03% RDG and a 0.1 µΩ resolution. The reliability andaccuracy of the measurements is improved by a low temperature coefficient of 10 ppm/°C,automatic removal of EMF parasites before each measurement, metal temperaturecompensation and compensation of ambient temperature.